A Study on the Microstructure and Mechanical Properties Analysis of Hard and Soft Flims Deposition on the Si(100) Substrate

A Study on the Microstructure and Mechanical Properties Analysis of Hard and Soft Flims Deposition on the Si(100) Substrate

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === In this research, the mechanical properties of single layer carbon (C), titanium (Ti) and two layer carbon/silicon (C/Si) and titanium/silicon (Ti/Si) composite structure deposited by ultra-high-vacuum ion beam sputtering (UHV-IBS) have been investigated using...

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Bibliographic Details
Main Authors:	Shih-Tzung Hung, 洪世宗
Other Authors:	C.K. Chung
Format:	Others
Language:	zh-TW
Published:	2009
Online Access:	http://ndltd.ncl.edu.tw/handle/89645535993800397925

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