Novel design of microheater and research of thermal bubble growth

• Main Authors: Bo-Hong Zou, 鄒伯鴻
• Other Authors: Chung-Kuei Chung
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/38329780410311838326

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === The target of this research is to establish an observation system of thermal bubble and to design and fabricate the micro-heater in order to discuss the thermal bubble behavior for combining the mixer in our Lab and helping to mix faster and good mixing efficiency. In fabrication of micro-heater, this research focus on the design of micro-heater and the choice of materials further. For design, we use single mask to fabricate the heater replacing several masks for saving the fabricating time. For the materials, we choose the Ta to be the material to replace polysilicon and expensive material Pt which were usually used in past. In the system of observation system, we design a flash observation system to substitute for the expensive high speed CCD for saving the money. Using high light LED to flash for freezing the thermal bubble instant behavior and using the ordinary CCD system to catch movie of bubbles. Finally, using the cutting soft to get the pictures of instant bubble behavior to know the bubble growth and shrink for the combination of our Lab mixer in the future. Finally, we’ll discuss bubble sizes between frequencies and voltages and the feasibility of observation system. We can know the micro-heater in this research can generate well bubbles in low frequencies. And the advantages of the micro-heater in this research, like low resistance, heat-resistant degree, and good heat dissipation, contribute to improve the heat dissipation and the strength of the Pt micro-heater for increasing the life of the heater.