| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 97 === This thesis proposes a new micro/nano-fabrication method which can directly transfer a patterned metal film from a silicon mold to a flexible polymeric substrate based on infrared optical heating and roller-based contact loading. The PET film is chosen as the flexible substrate and a silicon mold with pre-defined surface features in micro- and nano-scale is coated with a anti-adhesion layer and then a thin metallic film. A roller-loading mechanism is designed to bring the PET and the silicon mold into intimate contact while an infrared lamp can heat up the metal film through thermal radiation. The heated and patterned metallic film can then emboss into its adjacent PET material and therefore complete the pattern transformation.
In this thesis, we demonstrate successful pattern transformation with smallest line-width of 60 nm and a area size of 4x4 cm2. Linear grating structure is embedded into PET substrate which forms a flexible optical polarizer. Experimental investigation have be carried out to identify the best imprinting parameters, mechanism design, as well as material combination to optimize the effects of this IR-heating and roller imprinting pattern transformation.
The proposed method has several unique advantages: nano-scale and large-area patterning capability, direct pattern transformation without chemical etchings, fast processing and low-cost and easiness in implementation using simple setups. Therefore, it has great potential for mass-production of micro/nano-structures and for industrial applications.
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