| Summary: | 碩士 === 國立成功大學 === 電機工程學系碩博士班 === 97 === When an electrical current with a low frequency is applied to a single cell, the pathological change of a cellular organelle that takes place inside the cell cannot be determined. To overcome the shortcomings of low frequency measurement, this paper combines a microfluidic device to capture single cells and a coplanar waveguide electrode inside a channel to measure the impedance of a single HeLa cell (human cervical epithelioid carcinoma) over the frequency range of 1 MHz to 1 GHz. The on-chip calibration technique is used to characterize the compound device. The technique improves the calibration accuracy by shifting the calibration reference plane to the de-embedding reference plane. This work presents a compound conductor backed coplanar waveguide (CBCPW) device which integrates two substrates for impedance analysis at the single-cell level. The outside part of the compound CBCPW is the FR4 substrate as the connection interface of a vector network analyzer (VNA) using a SubMiniature-A (SMA) connector. The inside part of the CBCPW is a glass substrate with electrodes to measure the impedance of a single cell. Various applications are demonstrated, including sodium chloride solutions with various concentrations, de-ionized (DI) water, alcohol, PBS, and a single HeLa cell. Equivalent circuit models of PBS and a single cell are used to explain the experimental impedance data.
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