Studies of Si/SiGe and Si/SiGeC Heterojunctions on Porous Silicon Substrates for Infrared Light Detecting Applications
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === In this thesis, we used various etching conditions to prepare porous-Si (PS) layers on N-type (100) silicon substrate. The layer with a porous structure can increase photo-absorbing area, and shift the peak of absorbing wavelength, thus improving the flexibi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39126400043131425307 |