Fabrication of Integrated Ⅲ-Nitride Compound Semiconductor Based Gas Sensors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === Over the past decades, different types of gas sensors were developed. With the quick development of the fabrication technologies, semiconductor based gas sensors with small size and high sensitivity have become the mainstream of the research process. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19031959657866434105 |