Studies of Novel SiCN Ultraviolet Light Detectors and LTPS Mass Application Hydrogen Sensors
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 97 === In this dissertation, we report the investigations of novel SiCN ultraviolet light detectors and LTPS (low temperature polysilicon) low cost hydrogen sensors. Four type structures including n-SiCN/p-PS/p-Si heterojunction, n-SiCN/p-SiCN homojunction, and n-S...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19081000956064163240 |