Investigation on structure and photoluminescence of ZrO2:Sm3+ produced by RF sputtering deposition

• Main Authors: Wei-jung Kao, 高瑋嶸
• Other Authors: Jow-lay Huang
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/33734916556974523588

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 97 === There is a global energy shortage problem, so we must try to invent a energy-saving and environment friendly lighting product. LED is a ideal one. White light LED is composed of different color light. The presupposition of high luminescence efficiency is a host with low phonon energy, just like ZrO2. Sm is a rare-earth element and its emission wavelength range is from yellow to red light. We’re looking for a great procedure for high efficiency. According to previous research, we use RF-sputtering because of less process of RF sputtering. The best oxygen concentration for experiment was 2%. We used 0.33at% 0.46% 1.48% 2.19% of Sm3+ as model. The highest luminescence efficiency concentration was 0.33at%. When the dopant concentration was changed, Monoclinic and Tetragonal had different effect on 574nm、575nm、622nm. The rest of emission peak were contributed to Monoclinic. Key word：RF sputtering、Sm、Monoclinic