| Summary: | 碩士 === 國立成功大學 === 工程科學系專班 === 97 === In the thesis we study the parameters affecting the thermal expansion of the metal mask and the glass of panel of Organic Light Emitting Display during the evaporation process, and establish the relationship between these parameters and the thermal expansion of glass substrate.
The parameters include heat source temperature, distance from the heat source to glass substrate, heat source scan speed, heat source scan times, chiller cooling temperature in vacuum chamber. Firstly we use different parameters to evaluate the effect of the surface temperature on the metal mask and the glass substrate to calculate the difference of thermal expansion between the metal mask and the glass substrate, to establish a table for further estimation purpose.
The main factors are the evaporator time, heat source temperature and the distance of heat source to glass substrate. Their relationships of the can be used to control the thermal expansion of the glass substrate.
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