SOP of the validation of cleanroom engineering
碩士 === 國立勤益科技大學 === 冷凍空調系 === 97 === The performance of cleanroom affects directly the quality and yield rate of manufacturing process, such as semiconductor and wafer process、precision mechanical manufacturing、biochemical pharmaceutical production、bio-technology etc. After the introduction of nano-...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99909020605239577131 |