| Summary: | 碩士 === 國立勤益科技大學 === 電機工程系 === 97 === DC servo control system plays an important role in the process of industrial production, such as impedance matching network, robotics, CNC engraving and milling machines, and sewing machines, etc. Using the DC servo motor to drive the mechanism, therefore machine tools achieve their manufacturing function. When DC servo motors drive the robot arm, the robot can execute complex operation; drive the sewing machine, sewing machine can embroider the desired patterns. In this thesis, we applied the embedded DC servo electrical control system to the impedance matching networks which have broad application on the semiconductor industry. By tuning the variable capacitors the impedance matching condition is obtained.
In order to obtain more widely application, an embedded DC servo electrical control system is developed in this thesis, which used PIC microcontroller as the control kernel and integrated the necessary peripheral interface, such as including push buttons, LCD displayer and connectors. Connecting the necessary junction points to the connectors, it is easy applied to other DC servo system. This embedded DC servo electrical control system also reserved the communication port to benefit the control data transfer between PIC and PC. The communication programs are written using MPLAB and Labview respectively.
In this thesis, our final objective is to control the matching network. Therefore, the developed embedded DC servo electrically control system is applied to the matching network. In plasma system, matching network is installed between RF generator and vacuum chamber. By tuning the variable capacitors which driving by DC servo motors, such as the two arms’ variable capacitors in π-type matching network, the maximum power transfer is obtained to guarantee the successful plasma generation. Therefore, many plasma processes can be implemented, such as dry etching, sputtering, plasma enhanced chemical vapor deposition, reactive ion etching, and high density plasma.
In this thesis, the developed embedded DC servo electrical control system mainly contains a PIC CPU, two DC driver circuits, potentiometers, phase detection circuit and the necessary peripheral interface. Integrating the mechanical structure, the electrical control board, system identification and the basic control theorem, the servo control of π type matching network is implemented. The experimental results, including PID regulation and tracking control, communication interface between PIC and PC, demonstrate the feasibility of the built electrical control system for matching network.
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