Study on Characteristics of ZnO:Ti thin films
碩士 === 國立中興大學 === 電機工程學系所 === 97 === This study employed the RF (13.56 MHz) Magnetron Sputtering System to investigate electrical and optical properties of TZO thin-films, for optoelectrical applications. By using argon as the sputtering gas medium, the electrical, optical, and structural propertie...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/87807436978474799050 |