| Summary: | 碩士 === 國立中興大學 === 電機工程學系所 === 97 === In this thesis, we probe into, utilize copolymer membrane PS-b-PMMA form PS endure rice method of ball and the universe etch, make, offer silicon endure rice structure of column with reaction coincidence electric thick liquid ion.
Take an exam of the thesis to reveal, we can be endured the structure of hole of rice on Silicon wafer by macromolecule PS-PMMA which endure the rice size at appropriate temperature, heating time and condition of the heating temperature. Among course to make Cheng, we find glacial acetic acid heat PS-b-PMMA endure rice step of hole will form polystyrene (PS) Endure rice globular structure , from experimental result point out all: With heating the changes of time and temperature, the membrane becomes globular to take shape catenately crackedly finally, and can have and change and endure the quantity change of the rice ball in accordance with heating time.
Etch (RIE) via the universe of electric thick liquid of reactivity ion ,In order to endure rice ball as stop layer regard as, etch, hide, put on. And it is for strengthening endure it is the dark and wide in rice the columns than ,utilize SiO2 not to be come endure there aren''t rice the ball patterns, can get, endure rice silicon of structure endure rice column array, utilize PECVD grow up I layer and N layer form P-I-N type endure the Milan column solar cell and then.
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