A Study on the Design and Analysis of Micro Stage

• Main Authors: Lyi-Hsieh Chen, 陳俋先
• Other Authors: Jau-Liang Chen
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/98380661009943893073

碩士 === 國立中興大學 === 機械工程學系所 === 97 === The objective of this research is to design a precision stage for micro mobile robot. It is hope that this robot can move on a plane along X and Y axis with nanometer precision. The mathematic models of the stage were established. The physic characteristics, such as system stiffness, maximum displacement of the stage, main stress, shear stress and natural frequency of the stage were determined through this study. Then, finite element analysis and experiment was applied to verify the accuracy of the formulation results. Finite element analysis was about static and natural frequency analysis. And the experiment was include of displacement and natural frequency experiment. These error were within 20%.