A Study on the Design and Analysis of Micro Stage
碩士 === 國立中興大學 === 機械工程學系所 === 97 === The objective of this research is to design a precision stage for micro mobile robot. It is hope that this robot can move on a plane along X and Y axis with nanometer precision. The mathematic models of the stage were established. The physic characteristics, such...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/98380661009943893073 |