Study on Crystallization of Low Temperature Poly-silicon Thin Films Using Optical Transmittance and Reflectance
碩士 === 國立中興大學 === 機械工程學系所 === 97 === This thesis concerns the crystallization of low temperature poly-silicon films. The sizes of grains in poly-silicon films are determined by optical transmittance and reflectance measurements. These optical measurements allow for the quality control of growing low...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77431693295133579325 |