A Study on The Control of Multi-Axis Precision Positioning Stage
碩士 === 國立中興大學 === 機械工程學系所 === 97 === The objective of this research is to design a suitable controller for a multi axes positioning stage. The dimension of this positioning stage is 140mm 140mm 10mm, and with XYθ three degree of freedoms. Piezo-electric actuators are used to drive the stage. Largran...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/26118223147516274914 |