A Study on The Control of Multi-Axis Precision Positioning Stage

• Main Authors: Lung-Chun Chen, 陳龍春
• Other Authors: Jau-Liang Chen
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/26118223147516274914

碩士 === 國立中興大學 === 機械工程學系所 === 97 === The objective of this research is to design a suitable controller for a multi axes positioning stage. The dimension of this positioning stage is 140mm 140mm 10mm, and with XYθ three degree of freedoms. Piezo-electric actuators are used to drive the stage. Largrange’s equation is used to derive the mathematic model of this stage. For the controller, a fuzzy control strategy is used to overcome the coupling effect of the stage. The XYθ displacement errors and differential of these errors are selected as the input of the controller. While, the displacement compensations on XYθ axes are used as the output. In order to simplify the rule base and program, the input and output variables are divided into X, Y, θ three subgroups. The controller is then composed by three subsystems according these three subgroups. From the simulation results, the settling time on X-axis, Y-axis andθ-axis is controlled within 0.02 second. While, from the experiment result, the error on X-axis, Y-axis andθ-axis is less than 0.1 and 2 respectively.