Preparation of titanium thin films by physical vapor deposition using air/Ar mixtures and applications of the films in electromagnetic interference shielding
碩士 === 國立中興大學 === 材料科學與工程學系所 === 97 === Owing to their low electrical resistivity, high thermal stability and corrosion resistance, as well as excellent biocompatibility, titanium thin films have been widely applied in the industry. It is known that preparing titanium thin films by physical vapor de...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/30587502875875367261 |