Research of Textured and Fabrication of Aluminum-doped Zinc Oxide Films
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 97 === In this study, aluminum-doped zinc oxide (AZO) thin films are deposited on substrates such as: glass, SiO2 and ITO glass, through the change of etching parameter, the thin film surface is formed with nano-column structure. First, magnetron sputtering is us...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12399098978008515536 |