| Summary: | 碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 97 === This thesis proposes the design and control of flexibility microgripper in place of a general draw-way movement of cells. In the gripper, the Ground Structure Method of topology optimum is used to define the design domain and obtain topology shape of the flexibility mechanism. The UV-LIGA process is used to fabricate the microgripper with SU-8 thick film. In the actuator, the piezoelectricity ceramics (PZT)microactuator is used to increase the effect of driving and analyze the result with different drive voltages for the output performance.
In order to make the gripping control with great precision, we use the fuzzy PID controller system to improve the original PID controller, reduce error of the system, increases the stability, and the hysteresis phenomenon. In the experiment, we combine the actuator with the gripper by designing a platform and replacing the cell with the micro glass bead to carry on the clamp test .
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