The design and simulation of silicon-based micro-cantilever beam for band-pass filter – a lateral motion design
碩士 === 義守大學 === 電機工程學系碩士班 === 97 === There are many applications of using silicon–based micro–cantilever beams, such as wireless communication filters, sensors, and so on. The research has been focused on the filters that are vertically vibrated. Our focus is on the band–pass filter, which the motio...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2009
|
Online Access: | http://ndltd.ncl.edu.tw/handle/77259663865064512730 |