Prototyping a Control mechanism for a Nanostage
碩士 === 華梵大學 === 機電工程學系博碩專班 === 97 === The object of this thesis is to develop a PC-based fuzzy control system to subtly drive a prototyped nanostage mechanism using piezoactuators in three axes. The modified prototype consists of a nanostage, piezoactuators, strain gauges, control circuits, a Natio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47697697168829369048 |