Prototyping a Control mechanism for a Nanostage

• Main Authors: Hsiung Chih-Wei, 熊志維
• Other Authors: Lee Fu-Shin
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/47697697168829369048

碩士 === 華梵大學 === 機電工程學系博碩專班 === 97 === The object of this thesis is to develop a PC-based fuzzy control system to subtly drive a prototyped nanostage mechanism using piezoactuators in three axes. The modified prototype consists of a nanostage, piezoactuators, strain gauges, control circuits, a National Instrument interfacing card, and a precision positioning fuzzy control algorithm. The goal is to improve the fine movement characteristics of the existing nanostage system once implementing the developed fuzzy control rules on the piezoactuators, and it is achievable to minutely and precisely position the nanostage to a desired configuration. The research utilizes Micro-E Mercury 350 optical scales placed on fixtures to acquire the nanostage’s piezoactuated fine linear and rotary displacements, and the measured data are sent to the PC system through encoder ports of the optical scale utility for calibration purposes. The generated strain gauge voltages at the ends of the piezoactuators are feedback to the PC’s fuzzy control system through high-resolution A/D converters of the interface card to exercise the developed control algorithm. Then, the system sends the calculated control laws to the piezoactuator driver circuits through D/A converters of the multi-function interface card, and the piezoactuators in turn precisely drive the nanostage to compensate the displacement errors.