Studies of Nitrogen Doped Zinc Oxide Thin Films by Ion Beam Sputtering at Room Temperature
碩士 === 輔仁大學 === 物理學系 === 97 === The study of ZnO films doping nitrogen was deposited by ion-beam sputter deposition (IBSD). Two deposition approaches using IBSD technique at the room temperature with different working gases、nitrogen and argon、were examined to fabricate the ZnO:N films. One was using...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25884953428158114564 |