Physical Properties of Silicon Micro-Cantilever Beams with Coated Carbon Nanotubes
碩士 === 逢甲大學 === 機械工程學所 === 97 === In this thesis, single crystal silicon micro-cantilever beam is fabricated by MEMS techniques on a 4 inch wafer. Three kinds of surface treatments were conducted on the beam including coating nickel by sputtering, annealing and CVD for growth of carbon nanotubes. Wi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09595941269641503987 |