Fabrication and DeformationAnalysis of Micro Cantilever Platewith Double Layer Structure
碩士 === 逢甲大學 === 機械工程學所 === 97 === In MEMS, micro cantilever plates are often made of double layers. During thermal treatment of micro fabrication process with temperature of hundreds degrees, residual stress would be induced after cooling to room temperature. It is for mismatching of thermal expansi...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31140074004056157160 |