Application of TPM on Semiconductor Manufacturing-A Case Study on the DRAM Firm

• Main Authors: Teng-Kai Yu, 游登凱
• Other Authors: Hsiu-wei Kuo
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/69285759529448846729

碩士 === 逢甲大學 === 經營管理碩士在職專班 === 97 === DRAM industry always suffers from the unbalance of demand and supply. It causes the spot price is often lower than the production cost. Therefore, DRAM firms look for cheaper production ways to sustain its daily operation. One solution of reducing production cost is to decrease defects from production, to enhance the tool efficiency and to promote the utilization of production. How to increase the Overall Equipment Effectiveness (OEE) of a semiconductor factory becomes an important issue for the DRAM production. This research is to study the implementation of Case Improvement of TPM (Total Production Management) in the PHOTO area at DRAM firm.TPM is considered as useful ways to increase OEE of the semiconductor production. According to TPM, the construction of tools can be improved and the defects can be cleaned out, and then the production loss will be decreased deservedly. In additional, the spirit of seeking the Zero Defect, Zero Break Down, and Zero Disaster may be taken as management target. A practical process of implementation of TPM is also proposed. The case study of this thesis illustrates the implementation of TPM by using the proposed process. Results show that TPM may be applied to PHOTO area of the DRAM firm successfully and OEE is also increased. Managers may imitate the case study to manage the maintenance of production facilities for their DRAM manufacturing.