DESIGN AND FABRICATION OF A MICRO GAS CHROMATOGRAPHY SYSTEM
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This paper exploits the realization of wet-etched micro gas chromatography columns for portable gas analysis system. A platinum layer is deposited on the Pyrex 7740 glass wafer to form a heater. MEMS technologies are used to deposit a silicon nitride layer on a...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10721906457667681987 |