DESIGN AND FABRICATION OF A MICRO GAS CHROMATOGRAPHY SYSTEM

• Main Authors: Shih-Cyuan Chen, 陳仕荃
• Other Authors: Chia-Yen Lee
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/10721906457667681987

碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This paper exploits the realization of wet-etched micro gas chromatography columns for portable gas analysis system. A platinum layer is deposited on the Pyrex 7740 glass wafer to form a heater. MEMS technologies are used to deposit a silicon nitride layer on a silicon wafer to form a etch mask in the wet-etching process. The channel patterns are fabricated using RIE to etch the silicon nitride layer and then wet-etching. After the channels are etched, a glass wafer was bonded as the top plate to form the columns. The micro gas chromatography chip (GC-on-a-chip) is then formed by trapezoid cross section columns which separate gas mixtures with the same performance as commercial fused silica capillary columns.