DESIGN AND FABRICATION OF A MICRO GAS CHROMATOGRAPHY SYSTEM
碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This paper exploits the realization of wet-etched micro gas chromatography columns for portable gas analysis system. A platinum layer is deposited on the Pyrex 7740 glass wafer to form a heater. MEMS technologies are used to deposit a silicon nitride layer on a...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10721906457667681987 |
| Summary: | 碩士 === 大葉大學 === 機械與自動化工程學系 === 97 === This paper exploits the realization of wet-etched micro gas chromatography columns for portable gas analysis system. A platinum layer is deposited on the Pyrex 7740 glass wafer to form a heater. MEMS technologies are used to deposit a silicon nitride layer on a silicon wafer to form a etch mask in the wet-etching process. The channel patterns are fabricated using RIE to etch the silicon nitride layer and then wet-etching. After the channels are etched, a glass wafer was bonded as the top plate to form the columns. The micro gas chromatography chip (GC-on-a-chip) is then formed by trapezoid cross section columns which separate gas mixtures with the same performance as commercial fused silica capillary columns.
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