| Summary: | 碩士 === 清雲科技大學 === 電子工程系所 === 97 === In this dissertation, a novel instrument for measuring small rotation angle by use of the surface plasma resonance (SPR) technology or the principle of total internal reflection (TIR) is presented.
In the dissertation, two methods including TIR and ATR methods for measuring the magnitude and direction of small rotation angle are proposed. At first, two right-angle prisms that are not coated with any metal films are mounted on two precision rotary stages, respectively. By use of the TIR theory, the system is with the resolution of radian.
In addition, the other method based on the attenuated total-internal reflection theory is also proposed. The hypotenuses of the two right-angle prisms are coated with 2-nm Ti film and 45.5nm Au film. And the two prisms are mounted on two precision rotary stages, respectively. The system based on the ATR theory is with the resolution of radian.
However, the two systems for measuring small rotation angle have some merits e.g., a simple optical setup, high resolution, high sensitivity, high reliability and in real-time measurement. And its feasibility is demonstrated.
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