Synthesis and Characterization of template-grown 1D array nanocapacitors using anodic aluminum oxide membranes

• Main Authors: Sung-Lin Tsai, 蔡松霖
• Other Authors: Hong-Wen Wang
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/07322620215589938978

碩士 === 中原大學 === 奈米科技碩士學位學程 === 97 === The fabrication and electrical properties of nanocapacitor arrays made by utilizing cylindrical Ba0.7Sr0.3TiO3 nanotubes grown inside the anodic aluminum oxide membranes were studied. Perovskite barium strotium titanate (BST) nanotubes were synthesized using sol-gel process, and the electrode Au nanorods were electrochemically deposited into the BST nanotubes. Nanocapacitor arrays were produced within the aluminum oxide template by depositing Au thin film on top of the template, forming metal/insulator/metal (MIM) structure. Characteristics of template-grown 1D array nanocapacitors of Au nanorods with different lengths were analyzed and compared. The relationship between properties and conditions of synthesis were then explored. The capacitances of nanocapacitor arrays as high as 10nF was obtained. Such high capacitance arrays can be applied to nanoelectronic devices.