Applying Neural Network and Taguchi Genetic Algorithm to Optimization of Photolithography Process of SAW Device-A Case Study on SAW Filter
碩士 === 中原大學 === 機械工程研究所 === 97 === Abstract The fabrication of inter-digital transducer (IDT) on piezoelectric material is the key of the surface acoustic wave (SAW) devices, which includes the photolithography process to control the width of IDT and the sputtering process to dominate the uniformity...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72901105881196470767 |