Fault Detection and Classification of PECVD Equipment Using Neural Network

Fault Detection and Classification of PECVD Equipment Using Neural Network

碩士 === 中原大學 === 機械工程研究所 === 97 === Currently, the thin film processes are the major process in the TFT industry. Among all the thin film processes, the chemical vapor deposition process, or CVD, is especially important for processing nonmetallic thin films. Although, over the years, different CVDs a...

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Bibliographic Details
Main Authors:	David Chiu, 邱瑞隆
Other Authors:	none
Format:	Others
Language:	zh-TW
Published:	2009
Online Access:	http://ndltd.ncl.edu.tw/handle/84962085151394276005

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