The Application and Evaluation of Recycled Positive Photoresist in TFT Array Process
碩士 === 中原大學 === 電子工程研究所 === 97 === Abstract The main purpose of this research is to construct an methodology to evaluate the possibility of recycling of photoresist used in the photolithographic processing of TFT-LCD production line. From the results obtained in this study, it is expected to prom...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45127228472527416028 |