Study of using femtosecond laser and chemical etching to fabricate a microfluidic inside photosensitive glass and discussion of manufacture parameters

碩士 === 國立中正大學 === 光機電整合工程所 === 97 === This study focuses on fabrication of microstructure inside the photosensitive glass using a femtosecond laser directing writing method. The photosensitive glass is first processing by the laser to selectively modify its material property under the laser path....

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Bibliographic Details
Main Authors: Ping-Shung Lee, 李評翔
Other Authors: Jeng-Shyong Chen
Format: Others
Language:zh-TW
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/11575650668342913048