Laterally Driven Microwave CMOS MEMS Switch Designs and Applications
碩士 === 國立中正大學 === 電機工程所 === 97 === In this thesis, four microwave/millimeter wave MEMS switches using the standard CMOS technologies are analyzed, designed and fabricated. Different with the readily developed MEMS switches, the major challenge in this work is the lack of fabrication freedom due to t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44592641963197084118 |