| Summary: | 碩士 === 國立中正大學 === 物理所 === 97 === The measurement of 3-D profiles is very important in daily industrial applications. The defect problems in micro structure systems such as airplane wing, guided missile and circuit boards, will influence quality and security of the products seriously. Thus, the development of a fast, cost-effective, automatic 3-D measurement and inspection system is a top priority in science and technology. This thesis is aimed to utilize the concepts of projection fringe topography and phase shifting interferometry, combining with high-speed, high-resolution CCD or CMOS sensors and the sophisticated digital image processing, that is capable of measuring 3-D profiles with high speed and precision. Remote access the proposed system through the internet by iLab, a novel technique to control and monitor a real experiment, will be employed. Several image processing and numerical algorithms, such as wavelet transform, histogram modification, and spatial filtering, will be used to reduction of noises from image acquisition and to enhance the measurement resolutions.
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