Fabrication of Carbon Nanotube Field-Effect Transistor Compatible with CMOS Process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === The main objectives of this thesis aim to fabricate Carbon nanotube field-effect transistors (CNTFETs) combined with standard CMOS process. In this thesis, we will discuss the properties and fabrication of carbon nanotubes electronic devices on a CMOS chips. Th...
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9z4n68 |