Effects of Processing Parameters on the Ba2Ti9O20 Thick Films Prepared by Aerosol Deposition Method
碩士 === 國立臺北科技大學 === 資源工程研究所 === 96 === The aerosol deposition method is utilized to deposit Ba2Ti9O20 (B2T9) thick film on the Pt/Ti/Si substrate at room temperature. The efficiency of this method is high and the 2-dimensional pattern can be established directly. Through the control of various kinds...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/3mt3cg |