| Summary: | 碩士 === 國立臺北科技大學 === 環境工程與管理研究所 === 96 === The semiconductor industry demands a large amount of organic solvents which are harmful not only to the workers in the factory but also to the environment. Acetone is one of the common organic solvents for the semiconductor industry.
The usual treatment of volatile organic compounds, VOCs, which are the products after evaporating of the organic solvents, is incineration. Replacing higher temperature incineration with lower temperature catalytic incineration can save amazing cost in fuel.
The effect of catalyst to decompose VOCs rises enormously when the catalyst size shrinks to nano scale, which causes the increasing of reaction rate and decrease the requirement of high temperature.
In this study, the results showed that the nano-silver suspended in nitrogen gas and then inertially impacted on ceramic carrier can be one of the possible ways to apply catalyst. The nano-silver was produced by metal vapor synthesis method with condensation type aerosol generator of electrically heated ceramic tube.
The removal efficiency of nano-silver catalyst (10, 40, 60 nm) was tested with inlet acetone concentration 6118 ± 275 ppm at 250, 350, and, 450 ℃. The removal efficiency of nano-silver catalyst showed that monodispersed catalyst caused higher removal efficiency per mass unit or per aera unit than polydispersed one.
Acetaldehyde, 3-Buten-2-one, and 2-methyl-furan were identified in the outlet gas by GC/MS. These intermediaries will be totally oxidized if their duration of reaction increases.
|
|---|
