Study of ZrO2-TiO2 Dielectric Thin Film by the Sol-gel Method
碩士 === 國立聯合大學 === 電機工程學系碩士班 === 96 === The ZrO2-TiO2 (ZrTiO4) thin films were deposited on ITO/Glass substrates by using sol-gel technology. The effects of various thermal treatments on the physical properties and electric properties of ZrO2-TiO2 thin film also have been studied with various heat-tr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25595700470588726982 |