The Study of Photoelectric Properties of the Zr0.8Sn0.2TiO4 Thin Films Deposited by Excimer Laser Sputtering and the Measurement of the Responsivity in a MIS Structure
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 96 === In this thesis, we demonstrate the pulse laser deposition (PLD) of zirconium tin titanium oxide Zr0.8Sn0.2TiO4 (ZST) thin film on p-type Si(100) substrate by KrF Excimer Laser at room temperature. Deposition rate of ZST thin film at 0.3 Å/pulse has been achieve...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34390197480158361954 |