Design and Fabrication of Distributed-Feedback Laser and Electro-Absorption Modulator by Quantum-Well Intermixing Technique

• Main Authors: Sing-Yu Chen, 陳星宇
• Other Authors: San-Liang Lee
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/98128391610536634717

碩士 === 國立臺灣科技大學 === 電子工程系 === 96 === We integrate DFB laser and electroabsorption modulator by using the quantum well intermixing(QWI) technique for application in high speed transmission system. The active region is InGaAsP based quantum well structure. We utilize the impurity-induced inter-diffusion technique to change the bandgap of the active region and analyze the diffusion effect for different annealing conditions. We simulated the change of bandgap in the active region after appling the QWI technique. We observe the trend of wave-function change in the parabolic well. The active region material characteristics are analyzed to optimize the quantum well width. We measure the photoluminescent spectrum after the annealing at 700℃and 750℃, respectively. The shift of peak wavelength up to 80 nm is observed. After this investigation, we choose 65 nm of blue shift from the QWI to realize the electron-absorption modulated laser. The fabrication procedures and preliminary experimental results are demonstrated.