Study of Optoelectronic Properties of doped Silicon Films by TBP and TMB
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 96 === In this thesis, we deposited doped thin silicon films using a parallel plate PECVD system. We deposited doped thin silicon films and thin film a-Si:H solar cell on glasses using tertiarybutylphosphine (TBP) and trimethylboron (TMB) as the dopant precursors of n...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32864376097241662161 |