Design, Construction and Testing of an UHV System with Thin Film Process and Photoelectron Spectroscopy Facilities
碩士 === 國立臺灣科技大學 === 化學工程系 === 96 === In this project, we designing, constructing and testing an Ultra High Vacuum (UHV) system with thin film process facility and photoelectron spectroscopies. The system is composed by three chambers, namely Load-lock chamber, thin film process chamber and analysis...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10563600920266999492 |