The Design and Control of an Anti-vibration Platform using Disturbance Response Decoupling Techniques

• Main Authors: Yu Chia, Tsao, 曹祐嘉
• Other Authors: 王富正
• Format: Others
• Language: zh-TW
• Published: 2008
• Online Access: http://ndltd.ncl.edu.tw/handle/18624730047584328854

碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === This thesis emphasizes on the design and vibration control of an optical table. Due to the resolution requirement of semiconductor processing, vibration control of the system is increasingly important. Generally speaking, two kinds of disturbances, namely load disturbances from the machine and floor disturbances from the environment, need to be considered in this system. To achieve it, both active and passive control algorithms can be utilized to reduce the system vibrations by anti-vibration tables to insulate disturbances. However, the controller design of abti-vibration table is complicated due to the conflicting requirements for the two disturbances. Therefore, this thesis applies a newly developed technique, named Disturbance Response Decoupling (DRD), to deal with the performance requirements simultaneously. Applying this theorem, passive isolators are applied to reduce the floor disturbances while active isolators can be used to suppress the load disturbances. From the simulation and experimental results, the design is deemed effective.