The Analysis and Fabrications of a Contact Type Measuring Probe for Micro/Nano CMM with an Observing Unit
碩士 === 國立臺灣大學 === 機械工程學研究所 === 96 === In the modern metrological technology, coordinate measuring machings (CMM) can’t satisfy certain precision and accuracy in micro/nano scale due to the performance of the probing systems. The probing system is the limiting factor in the downscaled CMM. Many resea...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94150787551172107386 |