Motion Control of Thermal Actuator with Incorporated Active Heat Sink
博士 === 國立臺灣大學 === 機械工程學研究所 === 96 === In the micro-electro-mechanical systems (MEMS) regime, thermal actuators have been known for its advantages of high output force, low driving voltage and simple fabrication processes. This dissertation focuses on the dynamic control of the thermal actuation. For...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84172937680712299895 |